日本YAMATO等离子清洗机 PDC-200/210/510

Plasma Cleaner PDC-200/210/510

Model 200 210 510 Plasma Mode RIE RIE/DP RIE : Reactive Ion Etching DP : Direct Plasma High-frequency Output Max.300W Max.500W Oscillating Frequency 13.56 MHz Dimension of Stage(mm) 250×170 410×170

Purpose : Removal of Organic films, Surface cleaning, Surface reforming, Surface etching etc. Despite being desktop models, they feature high performance, are simple to use, and can obtain data easily. They are genuine RIE systems, and can be DP systems with the use of options. Interior

Composition figure

Specifications

Model PDC-200/210/510 Plasma Mode PDC-200(RIE or DP) / PDC-210(RIE and DP) Main Unit Aluminum chamber Internal dimension: 400mmW×250mmD×150mmH Electrode Parallel flat stage plate: 230mmW×170mmD Vacuum gauge Capacitance manometer Reaction gas system Two systems(Ar,O2) Controller Programmable controller Display LCD Touch panel Display Radio-Frequency Power Supply Input PDC-200: AC 100V,Single phase, 8A (50/60 Hz) / PDC-210: AC 200V,Three phase, 15A (50/60 Hz) Radio-frequency output power PDC-200:300W / PDC-210:500W Reference oscillator Quartz oscillator Oscillating frequency 13.56 MHz Matching adjustment Automatic tuning Discharge System (Vacuum Pump) only PDC-210 / PDC200 Optional Displacement Total 345 liters/min. Input power supply Three phases, AC200V, 4A, 50/60 Hz / PDC-200 Single phase ,AC100V,4A,(50/60Hz) Inlet configuration NW25 Outlet configuration NW25 Gas Systems Purge gas Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer Reaction gas G1 Oxygen (O2) and a mass flow controller (500 secm) / PDC-200:(200 secm) Reaction gas G2 Argon (Ar) and a mass flow controller (100 secm) Safety Mechanisms System Protections (1) Watching Vacuum Pump and RF generater Watching over current by Thermal Protector Magnetic relay. (2) Product Quartz oscillator When Matching unit have miss matching,protect quartz oscillator. (3) Door Panel Inter lock Build Inter lock switch. Actions against a trouble of the vacuum pump The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump. *The main valve closes *The gas feed valve closes *The isolation valve closes *The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding *The treatment process timer stops. REQUIRED UTILITIES Power Supply Main unit with vacuum pump PDC-200: Single phases, AC100V, 15 A, 50/60Hz PDC-210: Three phases, AC200V, 15 A, 50/60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long) Gases Purge gas Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2) Reaction gas G1 Oxygen (O2) (Feed pressure: 1.5 kgf/cm2) Reaction gas G2 Argon (Ar) (Feed pressure: 1.5 kgf/cm2) Connection port 1/4" swagelok joint bulkhead union (SS-400-61)   Note: Pressure regulators, filters and other protective devices shall be prepared by others. Connection Diameter of the Discharge Duct (and inlet Port) Vacuum pump's inlet port NW25 (with a flexible stainless steel hose of 1 meter long) Vacuum pump's outlet port NW25   Note: Every port has a connector designed for a flexible hose.