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产品[
日本YAMATO低温等离子灰化机 PR300/301
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产品名称:
日本YAMATO低温等离子灰化机 PR300/301
产品型号:
PR300/301
产品展商:
重庆泰图科技有限公司
简单介绍
一种广泛应用于半导体分析工作上的气体等离子装置
日本YAMATO低温等离子灰化机 PR300/301的详细介绍
| Low Temperature Asher |
| PR300/301 |
| Model |
| 300 |
301 |
| Method |
Barrel type of DP
DP : direct plasma |
| High-frequency Output |
| Max.300W |
| Oscillating Frequency |
| 13.56MHz |
| Reaction Chamber |
ø64×160mm
3 chambers |
ø118×160mm
1 chamber |
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The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work. It boasts outstanding operabi lity and safety, with an automatic tuning system as a standard component and other features. It has a compact design, with a small-size HF generator and an oscillation section integrated with a portion of the chamber, allowing it to be installed into a 19-inch rack.
- Three 64mm diameter chambers are included. (PR300)
- The unit can be set for a wide range of output conditions to handle a variety of testing samples.
- One 118mm diameter large chamber is accommodated.
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 The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc. |
 Reaction Chamber |
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| Control Panel |
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| Operation Flowchart |
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| Piping System Diagram (PR300) |
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| Specifications |
| Model |
PR300 |
PR301 |
 Method |
Barrel type of direct plasma |
| Control part |
| High frequency output |
300W variable (100W×3 chambers) |
| Oscillating frequency |
13.56 MHz |
| Output impedance |
50Ω |
| Tuning method |
Manual biaxial tuning method |
| Instrument |
Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set |
| Timer |
0.1sec. to 999h |
| Gas inlet |
1/4" stainless steel |
| Power source (50/60Hz) |
AC 100/220V, single phase, 1 kVA |
| Reaction part |
| Reaction chamber |
Made of super hard glass, ø64×160mm×3 chanbers |
Made of pyrex glass, ø118×160mm |
| Electrode structure |
Condenser type, 2-way split |
| Control system |
Auto pressure reduction, auto leak valve |
| Piping material |
Stailess steel, Teflon, Copper and Brass |
Stainless steel, Teflon |
| External dimensions(W×D×Hmm) |
438×520×556 |
438×520×656 |
| Weight |
Approx. 38kg |
Approx. kg |
| Standard Accessories |
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- Vacuum grease :1 container
- O-ring for reaction chamber :6 pcs.
- Sample dish (large and small) :each 4sets
- Lid for reaction chamber :4 sets
- Adapter for ground :1 pc.
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| Optional Accessories |
| Sample dish (large) Sample dish (small) Sample shelf Stand |
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