| Model |
PB600 |
PB1000S |
PA600D |
| Plasma method |
Barred type of DP mode |
DF mode |
| Electrode |
Split of Opposite electrode structure |
Round type electrode structure |
| RF generator |
0 to 600W |
50 to 1,000W |
0 to 600W |
| Oscillating frequency |
13.56MHz |
| Control system |
Digital display with PLC control |
Touch panel with PLC |
Digital display with one touch operation |
| Tuning method |
Automatic and Manual tuning |
| Timer |
1 sec. to 9H 59min.59 sec. |
| Chamber |
Made of quart glass |
| Chamber size |
ø200×300mmL |
ø300×500mmL |
Adapt for 6 inch wafer |
| Chamber temperature |
Digital display |
| Reaction gas |
O2,CF4 or others |
O2,Ar,CF4,C5F8,SF6 or others |
| Purge gas |
N2 or Dry air |
| Flow meter |
Flow meter 1 line
(O2 0 to 1,000 ml/min.) |
Mass flow control with digital display
(CF4 0 to 300sccm, O2 0 to 1,000sccm) |
| Vacuum gauge |
Piranie type
(0.4 to 3,000Pa/0.004 to 30Torr) |
Digital display (0.4 to 3,000Pa/0.004 to 30Torr) |
| Vacuum pump |
250 ml/min. |
700 ml/min. |
| Emargency stop switch |
Push type switch |
| Gas port |
1 line (1/4" SUS Swagelok) |
2 line (1/4" SUS Swagelok) |
| Purge port |
1 line (1/4" SUS Swagelok) |
1 line (1/4" SUS Swagelok) |
| Vacuum port |
1 line ( SUS NW25) |
1 line ( SUS NW25) |
| External dimensions |
500mmW×600mmD×650mmH |
640mmW×850mmD×1,695mmH |
650mmW×800mmD×1,500mmH |
| Power supply |
AC200/220/380V, 3 phase
and AC100/220V, single phase |
| Weight |
Approx. 130kg |
Approx. 180kg |
Approx. 150kg |