| Model |
PR-1000 |
 Main Unit |
| Chamber size |
ø300×500(D)mm |
| Chamber method |
Quartz glass |
| Electrode |
Condenser (4 division) |
| Plasma mode |
DP mode |
| Vacuum gauge |
Capacitance manometer T |
| Reaction gas system |
wo system (CF4, O2) |
| Main controller |
PLC controller |
| Display |
LCD color display and Touch panel (5.7 inch) |
| Door |
Manual open, swing type |
| External Dimension |
700(W)×820(D)×1600(H)mm |
| Radio-Frequency Power Supply |
| Input voltage |
AC 200V 8A 50/60Hz |
| Radio-frequency output power |
10 to 1000W |
| Reference oscillator |
Quartz oscillator |
| Oscillating frequency |
13.56MHz |
| Output setting system |
Digital setting |
| Matching adjustment |
Automatic tuning |
| Vacuum Pump |
| Displacement |
670L/min. |
| Input power supply |
3 phase AC200V 11A 50/60Hz |
| Inlet Configuration |
NW40 |
| Outlet Configuration |
NW40 |
| Gas System |
| Purge gas |
N2 |
| Reaction gas control |
Mass flow controller CF4 (F.S.300sccm)
O2 (F.S.300sccm) |
| System Protection of Equipment |
- Protect over current, Built in protect over current of Vacuum pump, RF power supply and main unit
- Protect quartz oscillator, When matching unit have miss matching, Automatic RF power down and protect quartz oscillator
- Door panel inter lock, Built in inter lock switch
- External cover safety lock switch
- Emergency stop switch
|
| System Protections by Software in PLC |
|
When occurred following conditions, Equipment stop and Error will display.
- In case of RF power is out of setting value.
- In case of gas flow (CF4, O2) is out of setting flow rate.
- In case of RFW power is over permission value.
- In case of Vacuum pressure does not reach within setting time.
- After finish plasma process, chamber does not become atmosphere.
|
| Utility |
| Electric power supply |
3 phase AC380V 20A 50/60Hz (Total system) with down transformer |
| CF4 gas |
0.15 to 0.25Mpa |
| O2 gas |
0.15 to 0.25Mpa |
| Pressure Air |
0.4 to 0.6Mpa for driving air valve |
| Connecting size |
1/4 swagelok |