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产品[
日本YAMATO低温等离子灰化机 PR500/510
]资料
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产品名称:
日本YAMATO低温等离子灰化机 PR500/510
产品型号:
PR500/510
产品展商:
重庆泰图科技有限公司
简单介绍
一种广泛应用于半导体分析工作上的气体等离子装置
日本YAMATO低温等离子灰化机 PR500/510的详细介绍
| Gas Plasma Etcher |
| PR500/510 |
| Model |
| 500 |
510 |
| Method |
Barrel type of DP
DP : direct plasma |
| High-frequency Output |
| Max.500W |
| Oscillating Frequency |
| 13.56MHz |
| Reaction Chamber |
| ø215×305mm |
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The PR500/510 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work. It boasts outstanding operability and safety, with an automatic tuning system as a standard component and other features.
- It has a compact design, with a small-size HF generator and an oscillation section integrated with a portion of the chamber.
- With the 215mm diameter large caliber chamber, the unit can process big testing samples.
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 The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc. |
 Reaction Chamber |
Control Panel |
With the 215mm diameter large caliber chamber |
FORWARD/REFLECT indicate by digital |
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| Operation Flowchart |
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| Piping System Diagram |
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| Specifications |
| Model |
PR500 |
PR510 |
 Method |
Barrel type of direct plasma |
| Control part |
| High frequency output |
Max. 500W |
| Oscillating frequency |
13.56 MHz |
| Output impedance |
50Ω |
| Tuning method |
Automatic tuning |
| Instrument |
Output watt meter (0 to 600W)
Reflected wave watt meter (0 to 300W)
Vacuum gauge, thermocouple type
Flow meter, needle valve integrated type, 2 sets |
| Timer |
0.1sec. to 999h |
| Gas inlet |
1/4" stainless steel, 2 inlet |
| Power source (50/60Hz) |
AC 100/220V, single phase, 2 kVA |
| Reaction part |
| Reaction chamber |
Made of quarts, φ215×305mm |
| Electrode structure |
Condenser type, 4-way split |
| Control system |
Auto pressure reduction, auto leak valve |
Touch panel with PLC control |
| Piping material |
SUS, Teflon |
| External dimensions(W×D×Hmm) |
438×520×760 |
520×630×760 |
| Weight |
Approx. 38kg |
Approx. 60kg |
| Standard Accessories |
| |
- Connection cable : 1 complete set
- Vacuum grease : 1 pc.
- O-ring for reaction chamber : 1 pc.
|
| Optional Accessories |
Frame for wafers, 2, 3, 4, 5, 6 inches Multipurpose angled frame
Aluminum etching tunnel Stand |
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