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产品[
日本YAMATO大气压式等离子清洗机 YAP510S
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产品名称:
日本YAMATO大气压式等离子清洗机 YAP510S
产品型号:
YAP510S
产品展商:
重庆泰图科技有限公司
简单介绍
大气压（常压）等离子清洗机在电子材料方面的应用范围十分广泛
日本YAMATO大气压式等离子清洗机 YAP510S的详细介绍
| Atmospheric Plasma Cleaner |
| YAP510S (On Patent Applying) |
| |
| Outline |
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Atmospheric Plasma Cleaner can be applied to wide range of usage such as electronic material by utilizing high-activation of high-energy electron and radical ion in plasma reaction.
This equipment has a lot of advantages;
- Vacuum Process is not required
- Simple Utility Preparation (Reaction gas and power supply only)
- Setting space also is saved (because of no vacuum system)
- Vacuum tank is not required so that the wider space is available for various purposes.
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| Features |
- The sample can be directly plasma-processed just by putting it on the stage.
- Low Temp. Plasma is available because of the atmospheric glow-discharging plasma
- Easily applied to In-line system because of no vacuum system.
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Application
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- Surface treatment for high polymer materials
- Glass panel cleaning for FPD
- Ashing treatment
- Surface activation(Oxidation or Deoxidization)
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| Specification |
| Standard Sample Size |
300 x 300mm (Can be customized) |
| Power Supply |
High Frequency Power Supply (Low Frequency also available) |
| Power Output |
500W |
| Gas |
3 lines (Selectable from Ar, He, O2 and N2) |
| Gas Flow Rate |
1 to 10L/min. |
| Utility |
Power Supply AC200V, 3-phase, 15A |
| Exhaust Duct |
10f |
| Standard Equipment Dimensions |
730W x 750D x 1,700Hmm |
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Control
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PLC, Touch Panel |
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