| Model |
PC1000-5030 |
| Plasma method |
RIE • DP |
| Electrode |
Parallel flat stage plate |
| RF generator |
100~1000W |
| Oscillation frequency |
13.56MHz |
| Control system |
LCD Touch panel with PLC |
| Chamber size |
(W)600×(D)370×(H)145mm |
| Stage size |
(W)500×(D)300mm |
| Chamber material |
Aluminum |
| Reaction gas |
O2,Ar,CF4,C5F8,SF6 or others |
| Purge gas |
N2 or Dry air |
| Flow meter |
Mass flow control 2 line |
| Vacuum pump |
700L/min |
| Gas system |
2 line (Reaction gas) , 1 line (Purge gas) |
| External dimension |
(W)900×(D)950×(H)1,530mm |
| Power supply |
AC200/220/380V 3 phase 25A |
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