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产品[
日本YAMATO大型等离子清洗机 V1500X
]资料
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产品名称:
日本YAMATO大型等离子清洗机 V1500X
产品型号:
V1500X
产品展商:
重庆泰图科技有限公司
简单介绍
大型等离子清洗机
日本YAMATO大型等离子清洗机 V1500X的详细介绍
| V1500X |
 |
- RIE / DP mode selectable
- Aluminum chamber
- For Magazine CSP/BGA
- LCD Touch panel operation
- Easy to set up parameter and operation
- Built in safety function with Emergency stop switch
|
|
Specifications
|
| Model |
V1500X |
| Plasma method |
RIE • DP mode |
| Electrode |
Parallel flat stage plate |
| Electrode material |
SUS-304 |
| Chamber temperature |
Digital display |
| RF generator |
100~1500W |
| Oscillation |
13.56MHz |
| Control system |
LCD Touch panel with PLC |
| Tuning method |
Automatic and Manual |
| Timer |
1sec-9H 59min 59 sec |
| Chamber size |
(W)600×(D)550×(H)600mm |
| Stage size |
(W)460×(D)400mm |
| Chamber material |
Aluminum |
| Reaction gas |
O2,Ar,CF4 |
| Purge gas |
N2 or Dry air |
| Flow meter |
Mass flow control 2 line |
| Vacuum pump |
1,400L/min |
| Emergency stop switch |
Push type switch |
| Gas port |
2 pc (1/4"SUS swage - lock) |
| Purge port |
1pc (1/4"SUS swage - lock) |
| Vacuum port |
1pc (SUS NW40) |
| External dimension |
(W)900×(D)1,000×(H)1,700mm |
| Power supply |
AC200/220/380V 3 phase 25A |
| Weight |
Approx. 300kg |
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